Electrostatic chucks (ESC) and ceramic heaters, developed through advanced ceramic integration technologies. By embedding metal electrodes within ceramic substrates using a high-precision fusion process, these products offer excellent stability and performance across demanding environments such as plasma processing and electronic wire manufacturing.
Key Product Features & Applications:
1. ESC with Integrated Heater (AlN-Based)
- Material: Aluminum Nitride (AlN)
- Tunable bulk resistivity enables wide temperature control and strong electrostatic adsorption.
- High design flexibility of the heating element ensures exceptional thermal uniformity.
- Integrated sintering of AlN and electrodes eliminates degradation-related performance loss.
- Compatible with bonded, hollow ceramic structures.
2. Electrostatic Chuck (Al₂O₃-Based)
- Material: High-purity Alumina (Al₂O₃)
- Lamination technology achieves high in-plane temperature uniformity.
- Reduced metal contamination risk through use of high-purity ceramics.
- Excellent durability in halogen plasma environments.
3. Ceramic Heater (AlN-Based)
- Material: Aluminum Nitride (AlN)
- High thermal conductivity ensures temperature uniformity within ±0.3%.
- Equipped for performance validation with IR cameras and TC wafers.
Our development and prototyping support ensures product adaptability for specific customer requirements, from R&D to practical deployment. We continue to expand our lineup to meet the evolving needs of semiconductor and high-tech manufacturing industries.
For more information or custom inquiries:Alumina Ceramics/Aluminum Nitride Ceramics/Metalization Ceramics ,please contact our technical sales team.