Porous ceramic vacuum chucks, also known as porous ceramic chuck tables, are designed with advanced microporous ceramics and high-strength frames. Their unique structure delivers excellent stability and performance for demanding industrial processes.
Four Key Advantages
- High flatness and parallelism for precision alignment
- Dense and uniform structure with superior mechanical strength
- Strong air permeability with pore sizes ranging from 5–200 μm and porosity of 30–50%
- Consistent adsorption force, with pressure variation within ±3 KPa in a 10×10 mm area
Application Fields
Porous ceramic vacuum chucks are widely adopted in:
- Wafer dicing machines
- Wafer thinning equipment
- Laser drilling systems
- Precision printing processes
- Air-floating platforms
- Wafer inspection systems
By combining high precision, durability, and stable adsorption, porous ceramic vacuum chucks have become an essential component in semiconductor manufacturing and precision engineering industries. They continue to support advanced production needs across electronics and high-tech applications.
For more information or customization options:Semiconductor Robotic Arm /Semiconductor Ceramic Robotic Arm /Wafer Handling Ceramic Arm